Laser lithography of nanostructures

We have two directions in nanofabrication - two-photon nanolithography and laser interference lithography.

Two-photon photolithography

Two-photon polymerization lithography (2PP) is a unique method of laser structuring. It is based on non-linear absorption in focal volume and allows high resolution in three dimensions. This lithographic method guarantees precise control of geometrical shape of manufactured structures which makes it an excellent candidate for the fabrication of various photonic structures. 

 

Laser interference lithography

In this maskless lithography technique, the standing wave pattern that exists at the intersection of two coherent laser beams is used to expose a photosensitive layer.
 

 

Publications

Articles

  1. A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev
    "Polymer X-ray refractive nano-lenses fabricated by additive technology"

    Optics Express

    25
    14173-14181
    2017
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  2. Ksenia A. Abrashitova, Dmitry N. Gulkin, Kirill R. Safronov, Natalia G. Kokareva, Ilya M. Antropov, Vladimir O. Bessonov, and Andrey A. Fedyanin
    "Bloch Surface Wave Photonic Device Fabricated by Femtosecond Laser Polymerisation Technique"

    Applied Sciences

    8
    63
    2018
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  3. Boris I. Afinogenov, Daria S. Kopylova, Ksenia A. Abrashitova, Vladimir O. Bessonov, Anton S. Anisimov, Sergey A. Dyakov, Nikolay A. Gippius, Yuri G. Gladush, Andrey A. Fedyanin, and Albert G. Nasibulin
    "Midinfrared Surface Plasmons in Carbon Nanotube Plasmonic Metasurface"

    Physical Review Applied

    9
    024027
    2018
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  4. Denis M. Zhigunov, Daniil A. Shilkin, Natalia G. Kokareva, Vladimir O. Bessonov, Sergey A. Dyakov, Dmitry A. Chermoshentsev, Aram A. Mkrtchyan, Yury G. Gladush, Andrey A. Fedyanin and Albert G. Nasibulin
    "Single-walled carbon nanotube membranes as non-reflective substrates for nanophotonic applications"

    Nanotechnology

    32
    095206
    2021
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  5. M. I. Sharipova, T. G. Baluyan, K. A. Abrashitova, G. E. Kulagin, A. K. Petrov, A. S. Chizhov, T. B. Shatalova, D. Chubich, D. A. Kolymagin, A. G. Vitukhnovsky, V. O. Bessonov, and A. A. Fedyanin
    "Effect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study"

    Optical Materials Express

    11
    2
    371-384
    2021
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  6. M.D. Aparin, T.G. Baluyan, M.I. Sharipova, M.A. Sirotin, E.V. Lyubin, I.V. Soboleva, V.O. Bessonov, and A.A. Fedyanin
    "Fabrication of Optical Microstructures with Gradient Refractive Index by Two-Photon Laser Lithography"

    Bulletin of the Russian Academy of Sciences: Physics

    87
    6
    710–714
    2023
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  7. M.I. Sharipova, T.G. Baluyan, A.S. Sverchkov, D.A. Shilkin, V.O. Bessonov, and A.A. Fedyanin
    "Finite Voxel Size Compensation for Microprinting of Parabolic X-ray Lenses by Two-Photon Lithography"

    Moscow University Physics Bulletin

    78
    3
    173–178
    2023
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Conference abstracts

  1. Ksenia A. Abrashitova, Dmitry N. Gulkin, Natalia G. Kokareva, Kirill R. Safronov, Artem S. Chizhov, Alexander A. Ezhov, Vladimir O. Bessonov and Andrey A. Fedyanin
    "Nonlinear polymer/quantum dots nanocomposite for two-photon nanolithography of photonic devices"

    SPIE Photonics West

    Proc. of SPIE Vol. 10115 1011510-1
    2017
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  2. Kirill R. Safronov, Natalia G. Kokareva, Ksenia A. Abrashitova, Dmitry N. Gulkin, Vladimir O. Bessonov, Andrey A. Fedyanin
    "Planar elements of photonics for controlling Bloch surface waves in one-dimensional photonic crystal"

    Days on Diffraction

    2017
  3. Natalia Kokareva, Kirill Safronov, Dmitry Gulkin, Ksenia Abrashitova, Vladimir Bessonov, Andrey Fedyanin
    "Fabrication of planar optical waveguides by two-photon lithography to control Bloch surface waves in photonics crystals"

    Open Readings, Vilnius, Lithuania

    2017
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  4. Gulkin D.N., Abrashitova K.A., Safronov K.R., Kokareva N.G., Antropov I.M., Bessonov V.O. and Fedyanin A.A.
    "Bloch-surface-waves based photonic devices studied by leakage radiation microscopy"

    Proceedings of International Conference on Metamaterials and Nanophotonics (METANANO-2017)

    AIP Conf. Proc. 1874, 030016-1–030016-3
    2017
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